@article {Cheung:2003:0736-2935:907, title = "Acoustical characteristics of dry pumps designed for semiconductor processes", journal = "INTER-NOISE and NOISE-CON Congress and Conference Proceedings", parent_itemid = "infobike://ince/incecp", publishercode ="ince", year = "2003", volume = "2003", number = "7", publication date ="2003-08-25T00:00:00", pages = "907-912", itemtype = "ARTICLE", issn = "0736-2935", url = "https://ince.publisher.ingentaconnect.com/content/ince/incecp/2003/00002003/00000007/art00025", keyword = "53.1, 11.6.3", author = "Cheung, Wan-Sup and Lim, Jong-Yeon and Chung, Kwang-Hwa", abstract = "", }