@article {Cheung:2003:0736-2935:907,
title = "Acoustical characteristics of dry pumps designed for semiconductor processes",
journal = "INTER-NOISE and NOISE-CON Congress and Conference Proceedings",
parent_itemid = "infobike://ince/incecp",
publishercode ="ince",
year = "2003",
volume = "2003",
number = "7",
publication date ="2003-08-25T00:00:00",
pages = "907-912",
itemtype = "ARTICLE",
issn = "0736-2935",
url = "https://ince.publisher.ingentaconnect.com/content/ince/incecp/2003/00002003/00000007/art00025",
keyword = "53.1, 11.6.3",
author = "Cheung, Wan-Sup and Lim, Jong-Yeon and Chung, Kwang-Hwa",
abstract = "",
}