@article {Pletner:2002:0736-2935:1143,
title = "On the precision servoelastic control of semiconductor manufacturing equipment in the presence of structural vibrations",
journal = "INTER-NOISE and NOISE-CON Congress and Conference Proceedings",
parent_itemid = "infobike://ince/incecp",
publishercode ="ince",
year = "2002",
volume = "2002",
number = "7",
publication date ="2002-07-15T00:00:00",
pages = "1143-1154",
itemtype = "ARTICLE",
issn = "0736-2935",
url = "https://ince.publisher.ingentaconnect.com/content/ince/incecp/2002/00002002/00000007/art00099",
keyword = "14, 46.4",
author = "Pletner, Baruch and Dorn, Huck and Karpel, Mordechai",
abstract = "",
}