@article {Chung:1999:0736-2935:167,
title = "A model based active vibration control for pedestal of semiconductor equipment",
journal = "INTER-NOISE and NOISE-CON Congress and Conference Proceedings",
parent_itemid = "infobike://ince/incecp",
publishercode ="ince",
year = "1999",
volume = "1999",
number = "5",
publication date ="1999-12-04T00:00:00",
pages = "167-176",
itemtype = "ARTICLE",
issn = "0736-2935",
url = "https://ince.publisher.ingentaconnect.com/content/ince/incecp/1999/00001999/00000005/art00012",
keyword = "12.3.1, 38.3",
author = "Chung, Yu-Liang and Chow, Yong-Lo and Lin, Jang-Yann",
abstract = "",
}