@article {Ungar:1983:0736-2935:487, title = "Vibration criteria for microelectronics manufacturing equipment", journal = "INTER-NOISE and NOISE-CON Congress and Conference Proceedings", parent_itemid = "infobike://ince/incecp", publishercode ="ince", year = "1983", volume = "1983", number = "3", publication date ="1983-07-13T00:00:00", pages = "487-490", itemtype = "ARTICLE", issn = "0736-2935", url = "https://ince.publisher.ingentaconnect.com/content/ince/incecp/1983/00001983/00000003/art00014", keyword = "49.3.2, 49.2.1", author = "Ungar, Eric E. and Gordon, Colin G.", abstract = "", }